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Marketing Communications Manager
Advanced Energy Industries, Inc.
Semiconductor manufacturers can improve tool performance with stable and reliable high voltage solutions for ion implantation, e-beam and e-chuck
San Francisco, Calif., July 12, 2016—
Advanced Energy Industries, Inc. (Nasdaq: AEIS), the world leader in precision power conversion, will dedicate its exhibit space at SEMICON®
West exclusively to a high voltage lineup that offers improved semiconductor tool process resolution, accuracy and stability. These enabling high voltage products will include high-performance ion beam technologies for ion implantation, precision e-beam technologies for SEM (scanning electron microscope) tools and high-performance electrostatic chuck (e-chuck or ESC) technologies for wafer manufacturing. Advanced Energy®
) will feature the OLS10K, EG353 and FLHV models, delivering impressive performance and a host of advantages for critical processes to improve tool performance and, ultimately, increase throughput and yield.
The rugged HiTek Power® OLS10K single-output high voltage power supplies for ion implantation manage excessive arcing conditions to achieve exceptionally high performance.
The accurate and reliable 35 kV HiTek Power EG353 series for precision SEM e-beam applications maximizes image quality and repeatability.
The stable UltraVolt® FLHV series provides power for the strong force of e-chucks with advanced controls and monitoring as well as floating (isolated) unipolar/bipolar high voltage outputs.
“For more than 35 years, AE has offered leading RF and DC process power technologies essential for semiconductor manufacturing,” said Yuval Wasserman, president and chief executive officer of Advanced Energy. “Our display at SEMICON West this year focuses exclusively on our high voltage technologies—a perfect complement to our process power line. It highlights unique capabilities in three different areas that enable our OEM customers to continue to innovate and evolve the industry.”
Since 1981, Advanced Energy has provided leading technologies that enable its customers to innovate. In 2014, the company added high voltage to its technology portfolio through the acquisition of UltraVolt, Inc., and HiTek Power Ltd., each with a rich history of more than 40 years. The result has been a combined high voltage offering of modules, racks and custom solutions for a range of OEM and end-user applications from a single, world-class supplier.
SEMICON West will take place at the Moscone Convention Center in San Francisco, July 12 – 14. AE will display its advanced high voltage technologies in the South Hall A, booth 2108, where researchers, process engineers and other innovators are encouraged to visit and share their ideas and breakthroughs.
About Advanced Energy
Advanced Energy (Nasdaq:AEIS) is a global leader in innovative power and control technologies for high-growth, precision power solutions for thin films processes and industrial applications. Advanced Energy is headquartered in Fort Collins, Colorado, with dedicated support and service locations around the world. For more information, go to www.advanced-energy.com.