For more information, contact:

Marna Shillman
Advanced Energy Industries, Inc.
Angie Kellen

AE to Debut Aera® PI-980™ Pressure-Insensitive MFC for Advanced Processes at SEMICON West 2005

FORT COLLINS, Colo., July 7, 2005—Advanced Energy Industries, Inc. (Nasdaq: AEISE) today announced that it will debut its Aera® PI-980™ series pressure-insensitive mass flow controller (MFC) during SEMICON West 2005. The company also will feature its Litmas™ RPS 1501 and 3001 remote plasma source platform, the Summit™ specialized DC power system and Navigator™ digital matching network at the exposition, held July 12-14 at San Francisco’s Moscone Center.


The new Aera PI-980 series pressure-insensitive MFC delivers greater flow stability, faster response, higher accuracy and superior real-time process control than previous technologies or competitive products. The PI-980 series is especially well-suited for etch, CVD, PVD and diffusion applications. Its superior gas-flow stability delivers greater chamber-to-chamber process repeatability for improved production yields. The advanced design integrates traditional thermal flow architecture with a pressure sensor, pressure display, temperature sensor, and NeuralStep™ control technology, creating a single delivery package and eliminating the need for the costly gas-panel components traditionally used to perform the same function.

Also showcased this year in AE’s booth #2202 will be the Litmas RPS integrated plasma source and power-delivery system. The Litmas RPS is well-suited to deliver reactive gas specie fluxes for process applications such as wafer pre-clean, photoresist strip and thin-film deposition. Its small footprint, high performance, ease of use and low cost of ownership allow process engineers to focus on developing critical plasma-based processes with lower device damage, higher throughput and higher yields.

In addition, AE will feature the newly-introduced Summit DC power supply that enables higher yields, increased throughput and a new level of process flexibility for sub-65 nm semiconductor, including the most demanding Generation 7 and 8 flat panel display (FPD) applications. The Summit power system delivers state-of-the-science arc management as well as exceptional power repeatability and precision to achieve the tight plasma process control for consistently high yields.

Also exhibited at the show will be the Navigator digital matching network, which provides advanced match technology for rapid, accurate and reliable matching across a wide range of load impedances. Equipped with microprocessor-controlled stepper motor circuitry and digital, user-selectable tuning algorithms, the Navigator matching network minimizes reflected power by automatically tuning the complex impedance of a coupled plasma. An optional, internal Z’Scan® RF sensor allows real-time measurement and analysis of process power and impedance, providing the ability to identify and significantly reduce process variability.

To learn more about AE’s products during SEMICON West, July 12-14, visit their booth #2202 in the south hall at the Moscone Convention Center in San Francisco. Editors interested in meeting with AE during the show may contact Angie Kellen by phone at: (650) 968-8900 x120, or email:

About Advanced Energy
Advanced Energy is a global leader in the development and support of technologies critical to high-technology manufacturing processes used in the production of semiconductors, flat panel displays, data storage products, compact discs, digital video discs, architectural glass and other advanced product applications.

Leveraging a diverse product portfolio and technology leadership, AE creates solutions that maximize process impact, improve productivity and lower cost of ownership for its customers. This portfolio includes a comprehensive line of technology solutions in power, flow management, thermal instrumentation and plasma and ion beam sources for original equipment manufacturers (OEMs) and end-users around the world.

AE operates in regional centers in North America, Asia and Europe and offers global sales and support through direct offices, representatives and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq National Market under the symbol AEISE. More information can be found at

Advanced Energy, AE, Aera, PI-980, NeuralStep, Litmas and Navigator are trademarks of Advanced Energy Industries, Inc.