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AE Introduces Specialized DC Power Systems Delivering Higher Yields and Increased Throughput for the Most Demanding PVD Applications
FORT COLLINS, Colo., Feb. 15, 2005
—Advanced Energy Industries, Inc. (Nasdaq: AEIS) today introduced its new Summit™ series of DC power conversion and control systems for the most advanced PVD applications. These specialized power systems enable higher yields, increased throughput and a new level of process flexibility for the most demanding Generation 7 and 8 flat panel display (FPD) and sub-65 nm semiconductor applications.