For more information, contact:

Marna Shillman
Advanced Energy Industries, Inc.
Dori Jones

Advanced Energy Extends Leadership in 300 mm Power Systems—Named Default Standard by Leading OEM

Secures AE's supplier-of-choice role for 200 mm and 300 mm power delivery solutions for leading manufacturer of semiconductor tools


FORT COLLINS, Colo., February 18, 2004—Advanced Energy Industries, Inc. (Nasdaq: AEIS) today announced that a leading semiconductor equipment manufacturer has selected AE's Apex® RF power delivery system as the default standard for a new 300mm semiconductor tool. As the established supplier of choice for this original equipment manufacturer's (OEM's) 200mm semiconductor tools, AE now enjoys the same role for its 300mm tools as well, further validating the company's expertise and leadership in power technology. AE's Apex 10 kW power delivery solution met the customer's higher power and higher performance specifications with the most compact package commercially available.


Commenting on the significance of this design win, Brenda Scholl, senior vice president and general manager of AE's Power group, stated, "This design win further underscores our technology innovation and market leadership in power delivery by building on the success we've already achieved with this valued customer for 200mm wafer technology. The Apex's ability to meet the higher power requirements necessary for the OEM's 300mm tools, together with AE's world-class global service and support infrastructure, were key factors in our being selected as the supplier of choice. We look forward to continuing to work in partnership with this customer to deliver the solutions and support they need to meet their customers' requirements."

Apex RF Power Delivery System
Advanced Energy's field-proven Apex RF power-delivery system provides high power density, power delivery consistency and process reliability. With a footprint that is significantly smaller than that of other power delivery systems, its smaller configuration enables the Apex to be conveniently mounted directly on the tool--taking up less costly fab space and thus improving cost of ownership.

The sophisticated technology of the Apex platform also provides superior performance for other plasma-based, thin-film processes, such as those used in the manufacture of data storage devices and flat panel displays, by maintaining and sustaining stable power in the vacuum chamber that is extremely critical to system performance and production for these applications.

About Advanced Energy
Advanced Energy is a global leader in the development and support of technologies critical to high-technology manufacturing processes used in the production of semiconductors, flat panel displays, data storage products, compact discs, digital video discs, architectural glass, and other advanced product applications.

Leveraging a diverse product portfolio and technology leadership, AE creates solutions that maximize process impact, improve productivity and lower cost of ownership for its customers. This portfolio includes a comprehensive line of technology solutions in power, flow and thermal management, plasma and ion beam sources, and integrated process monitoring and control for original equipment manufacturers (OEMs) and end-users around the world.

AE operates in regional centers in North America, Asia and Europe and offers global sales and support through direct offices, representatives and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq National Market under the symbol AEIS. For more information, please visit our corporate Website: