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Advanced Energy Industries, Inc.
Marna Shillman
Advanced Energy Industries, Inc.

Industry Veteran Kaveh Zarkar Named to New Post as Vice President of Semiconductor Products for EMCO Flow Systems, an Advanced Energy Company

Longmont, Colo., May 22, 2001—Advanced Energy Industries, Inc. (Nasdaq: AEIS), today announced that it recently appointed industry veteran Kaveh Zarkar, 46, to the newly created position of vice president of semiconductor products for EMCO Flow Systems, an Advanced Energy company. Zarkar, who has more than 20 years of experience in the semiconductor industry, has spent the last 12 years specifically focused on the research and development of fluid flow management systems. In his new role, Zarkar will be responsible for managing AE's line of EMCO flow products in the global semiconductor arena.


Commenting on the significance of Zarkar’s appointment, Vice President, General Manager of AE's instrumentation business unit Chris Fergen stated, "We plan to leverage Kaveh's extensive experience in fluid flow management to further our penetration of a market that is becoming increasingly critical to chipmakers and is showing signs of significant growth. As device geometries shrink and processes become more complicated and intricate, the accuracy and management of fluid flow is essential to enhancing chipmakers' device yields."

Earlier this year, AE acquired EMCO Flow Systems as part of its global business strategy in positioning AE as a leading provider of integrated technology solutions. "A key component of AE's convergent technology initiative is to provide applications solutions that enable chipmakers to improve their overall effectiveness in vacuum processes such as etch, physical vapor deposition and chemical vapor deposition. Kaveh's exceptional understanding of the dynamics of fluid flow management and applications knowledge will be instrumental in driving this significant part of our flow management business," Fergen added. Prior to joining Advanced Energy, Zarkar spent 12 years at Millipore Corp. His most recent position was director of advanced technology/applications development for the company's Gas Division. Before that, he held the position of vice president of applications engineering at Millipore's Tylan Division, and he served as director of engineering as well as manager of sensor development for the SPAN Division of Millipore. Before Millipore, Zarkar spent nearly 10 years at Dresser Industries, where the last position he held was as manager of R&D for the company's Instrument Division.

Zarkar earned his Ph.D. in electrical engineering from Stevens Institute of Technology (Hoboken, N.J.). In addition, he earned his master's degrees in business administration and electrical engineering from the University of Bridgeport (Bridgeport, Conn.), as well as a bachelor's degree in physics from University of Tehran (Iran). In addition, Zarkar has been awarded 13 patents and has 36 published technical papers.

About Advanced Energy
Advanced Energy is a global leader in the development, marketing and support of technology solutions that are central in the manufacture of semiconductors, data storage products and flat panel displays. Original equipment manufacturers (OEMs) and end-users around the world depend on AE products when plasma-based technology plays a vital role in their manufacturing process. AE offers a comprehensive suite of products for vacuum process systems, including power management, temperature sensing, dynamic temperature control, gas delivery management, process monitoring and machine control tools, ion-beam sources, and plasma abatement technologies. AE technology solutions are sold and supported globally by direct offices, representatives and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq under the symbol AEIS. AE’s URL is