For more information, contact:

Jim Donaldson
Advanced Energy Industries, Inc.
Marna Shillman
Advanced Energy Industries, Inc.

End-Point Detection System for CVD Clean now available from Advanced Energy

June 21, 1999—The RFEP product line which optimizes CVD clean processes with superior end-point detection is now available from Advanced Energy Industries, Inc. (Nasdaq: AEIS). Using in-situ RF sensors, the RFEP system eliminates problems inherent with optical measurement systems.



  • Shortens clean cycles:
  • Increases system up-time
  • Reduces gas consumption
  • Reduces greenhouse gas emissions
  • Higher throughput
  • Longer run times between wet cleans
  • Fast response to surface conditions
  • Longer life for tool consumables (e.g., chamber shower head and interior):
  • Lower particulate contamination:
  • Improves yields
  • Immune to degraded viewport conditions
  • No calibration required
  • No filters to swap

Copies of the brochure describing this end-point detection system are available at no charge by sending a request via e-mail to or from the web at

Advanced Energy Industries, Inc. is a leading developer and manufacturer of power supplies and related products that are critical in the manufacturing of semiconductors, data storage devices, flat panel displays, and other industrial products using thin-film technology such as glass coatings, decorative coatings, and optical coatings. Founded in 1981, AE is a publicly held company traded on Nasdaq, symbol AEIS. Its web site address is